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規(guī)格參數(shù)：

Dimension of L/W/H                                     ca. 350/350/175 mm
Rotary faceplate diameter                           320 mm
Weight complete                                           ca. 130 kg
Flatness of the faceplate                              3 μm
Maximal radial run-out (in the centre)        0.15 μm
Maximal axial run-out (in the centre)          0.15 μm
Axial stiffness                                                 200 N/μm
Position accuracy                                         0.50 arc-sec. / optionally 0.25 arc-sec.
Resolution                                                      < 0.01” arc-sec.
Measuring repeatability                               < 0.05” arc-sec.
Maximal load                                                 500 N (central)
Max. rotation speed                                          approx. 6 rpm / min
Torque (Nm/arc-sec)                                    ca. 0.15 Nm/arc-sec
Air consumption                                              70 L/min
Dimension controller                                     approx. 47/500/210 mm
Connection to PC                                          Ethernet / RS 232
Cable length to controller                             3 m
Software Control                                             software ACS SPiiPlus